Entegris is a leading supplier of advanced materials and process solutions for the semiconductor, advanced manufacturing, and other high-tech industries. For 60 years, we have been committed to solving our customers’ most demanding process challenges through a broad solutions portfolio, collaborative and innovative product development, and a focus on science and applications knowledge.
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The F300 AutoPod® wafer carrier is a 25-capacity, 300 mm front-opening unified pod (FOUP) that provides clean and secure wafer transport, and optimum automation integration for your facility. |
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The ProE-Vap® delivery system is designed for solid precursors used in Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) processes. |
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GateKeeper® GPU series of purifiers were designed to improve process gas consistency, lifetime and outlet purity. |
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1010 Series EUV Pods Entegris extreme ultraviolet light (EUV) reticle pod is designed to give defect-free protection of reticles and had demonstrates superior defectivity performance. |
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